Model CA5 and SA5 Ultra High Purity Back Pressure Regulator

Models CA5 and SA5 are high performance spring operated, flow-to-open back pressure regulators with an internal pressure balancing piston-cylinder that provides medium flow capacity and high pressure drop capability.


Regulator is used for “electronic grade” and other ultra-high purity fluids, either gaseous or liquid service. Most common fluids are high purity oxygen, nitrogen, hydrogen, helium and argon. 

  • All SST wetted trim materials.
  • Electro-polished finish.
  • Tube end connections.
  • High pressure capability.
  • Body Finish -15 μ-in. Ra average surface finish is standard.(Opt.-77 10 μ-in. Ra average surface finish avail able for Barstock body only). 
  • In-line maintenance.